Emeritus Professor Chang, Hong Young (장홍영)

2019.03.07 11:11

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Position: Emeritus Professor
Tel&office No: +82-42-350-2526
E-mail: hychang(at)kaist.ac.kr
Homepage: http://ltpl.kaist.ac.kr/
ResearchField: - Law Temperature Plasma and Tokamak Plasma

1987~Present:		Professor at KAIST
1986~1987:		Research Associate at Lehigh
1980~1983:		Full time Instructor at Kangwon National Univ.

Low temperature plasma
- Develop new processed and advance the plasma science knowledge base over the range in pressure from below 1m Torr to above 1 atm.
- Plasma parameter control
- Large Area plasma source development
Plasma Diagnostics
- Develop new diagnostics, sensors, and control strategies for plasma processing
- Langmuir probes and interferometer, LIF(Laser Induced Fluorescence), OES(Optical Emission Spectroscopy), QMS(Quadrupole Mass Spectrometer).
Advanced Plasma Processing
- Low dielectric constant(K 3) materials required as interlayer dielectrics for designing high performance intergrated circuits.
- To enhance both the knowledge and technology base for plasma induced gas phase and surface chemistry.
- Understand the influence of plasma parameters on the key material properties.
Tokamak Plasma
- Tokamak edge physics
- Develop new diagnostics